Invited Review Article: High-speed flexure-guided nanopositioning: Mechanical design and control issues
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چکیده
منابع مشابه
Invited review article: high-speed flexure-guided nanopositioning: mechanical design and control issues.
Recent interest in high-speed scanning probe microscopy for high-throughput applications including video-rate atomic force microscopy and probe-based nanofabrication has sparked attention on the development of high-bandwidth flexure-guided nanopositioning systems (nanopositioners). Such nanopositioners are designed to move samples with sub-nanometer resolution with positioning bandwidth in the ...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2012
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.4765048